Abstract
This paper discusses how Chemical Mechanical Planarization (CMP) is one of the most effective methods in achieving adequate local and global surface planarization and how chemical mechanical polishing of copper attracts a lot of interest. It examines the effects of different factors including the slurry, polishing pads and down force etc. on the quality of planarized copper layer in CMP Cu. It also presents, a new CMP copper technique with the name of "Abrasive-free polishing (AFP)".

Outline
Introduction to CMP and CMP Copper(Cu)
Techniques of CMP copper
Removal Mechanism
Slurry-- Chemistry
Slurry Abrasives Particles
Processing Factors
Polishing Pads
Abrasive-Free Polishing of Copper-a New Technique
Conclusions

From the Paper
"Recent years have witnessed the rapid development of using copper (Cu) for low resistivity electrical connections in microelectronic devices.1,2 In fact, copper is one of most commonly used pure metals in the electrical industry because of its low conduct resistivity of about 6-10-8W-m and excellent mechanical properties as well. There are various methods to deposit Cu thin films, for example, electroplating, electroless plating, sputtering and thermal evaporation can be used.3.4 The copper thin films achieved by these techniques, especially those from the electrochemical techniques, are not planar enough to promise a successful multilevel interconnection. However, in fabrication of a logic device with five or more layers, at least one layer should be perfectly planar. Lack of layer planarity may lead to severe problems for photo-lithography (such as insufficient focus depth) and dry etching in sub 0.5 mm 5. Chemical Mechanical Planarization (CMP) is one of the most effective methods in achieving adequate local and global surface planarization.6 Therefore, chemical mechanical polishing of copper attracts a lot of interests in recent years."

Tags:cmp, afp, films, slurry

Abstract
In this article, the writer maintains that until there is a united international criminal law and cooperation between law enforcement agencies to help stem international supply, drugs will continue to be a problem. The writer argues that drugs should be legalized and maintains that decriminalization could gain greater control. Further, the writer proposes various steps that need to be taken in order to combat the problem of drugs.


Outline:
Normalize the User, Not the Use?
AFP Initiatives Aimed at Curbing the Supply
Catching the Big Fish Doesn't Change the Diet
A Systematic Approach

From the Paper
"Often when we talk of decriminalization of drugs it sparks outrage and gives the impression that we will contribute to the expansion of drug culture to the point of them becoming as common in mainstream society as cigarettes. There is also the fear that those who are using drugs will continue their addiction and not receive help. But decriminalization is not a one-way street, and rather than a loss of control it is often aimed at gaining greater control. Instead of banning drugs, and going to war against drug use, time, resources and money should be spent on research, treatment and prevention. In order to do that we have to bring the affliction up to the surface rather than blindly fighting the underworld it stems from. In order to take a closer look, we have to give those who use drugs a closer look. Only then can we begin to alter their life-cycle which in turn will reduce the demand for drugs in our society. And only then can the drug trade fall by the waste side where it belongs."

Tags:drugs, illegal, drug, trade, illicit, drugs, ecstasy, amphetamines, legalize